Enabling Energy Efficient Solutions

Product Overview

ONBCD25: 0.25 µm Process Technology

Product Description
ONBCD25 from ON Semiconductor is a full-featured high-voltage 0.25 µm node technology. ONBCD25 contains 5 V single-gate or 5/12 V dual-gate high-voltage transistors combined with mixed signal features including MIM capacitors, Schottky diodes, zener diodes, high resistivity poly, plus a variety of npn/pnp bipolar transistors, capacitors, diodes and resistors. The high voltage transistors include optimized NLDMOS and high voltage PMOS 40/5 V, 40/12 V, 24/5 V and 12/12 V transistors. The high-performance/low-power 5 V digital library and one-time programmable (OTP) element offered in the baseline ONC25 technology are available as well. ONBCD25 provides the flexibility to implement a variety of mixed-signal functions in a product design.

Features

  • Gate Oxide voltages: single-gate 5 V, dual-gate 5/12 V
  • NLDMOS 40/5 V, 40/12 V, 24/5 V and 12/12 V (drain to source voltage/gate to source voltage)
  • High voltage PMOS 40/5 V, 40/12 V, 24/5 V and 12/12 V
  • High voltage Schottky diodes: 18, 30, 40 V
  • Zener diodes: 5.15, 5.5, 6.2, and 7.4 V
  • High voltage isolation
  • Variety of npn/pnp bipolar transistors, diodes and resistors constructed with high voltage process additions
  • 2 to 5 metal layers
  • Top metal thickness options: 1.0, 1.5 and 3.0 µm AI-0.5% Cu
  • LV MOS circuits can be floated in HV isolated wells
  • MIM capacitors: 1.0 fF/mm² located below top metal
  • High sheet resistance (1.5 kΩ) polysilicon resistor
  • Low temperature coefficient p-type polysilicon resistor
  • Salicided active and poly with optional blocking
  • Characterized ESD protection cells

Process Characteristics

Operating Voltage 5, 12, 24, 40 V
Substrate Material 200 mm P-Type, EPI
Drawn Transistor Length 0.5 µm (5 V CMOS)
Gate Oxide Thickness 125, 300 Å
Contact/Via Size 0.3/0.36 µm
Top Metal Thickness 1.0, 1.5, 3.0 µm (AI-0.5% Cu thickness)
Contacted Metal Pitch
   Metal 1 0.64 µm
   Metal 2-4 0.94 µm
   Metal Top  
      1.0 µm AI-0.5% Cu 2.00 µm
      1.5 µm AI-0.5% Cu 3.00 µm
      3.0 µm AI-0.5% Cu 6.00 µm
Metal Composition AI(0.5%Cu)

Sample Process Options

LV MOS Mask Layers
Single gate 5 V, 2 metal 23
Single gate 5 V, 5 metal 29
Dual gate 5 V & 12 V +2
MIM +1
30 V Schottky +1
40 V Schottky +1
5.15 V Zener +1
5.5 V Zener +1
1.5 kΩ/sq poly resistor +1
LTC poly resistor 0 to +1

Device Characteristics

(All Values Typical at 25°C)

HV DMOS

  Max Vds
(V)
Typ RDS(ON)
(mΩ/mm²)
Typ Vt
(V)
NLDMOS 12/12 V 13.2 8.5 2.22
PMOS 12/12 V 25 58.6 2.34
PMOS 12/12 V
Low Threshold Voltage
25 80.5 0.82
NLDMOS 40/5 V 44 40.8 0.95
PMOS 40/5 V 44 112 0.84
NLDMOS 40/12 V 44 44.2 3.24
PMOS 40/12 V 44 110 2.33
PMOS 40/12 V
Low Threshold Voltage
38 119 0.83
NLDMOS 24/5 V 47.7 28 1.3
PMOS 24/5 V 33 60 0.82

LV MOS

  Typ Vt Typ Idsat
NMOS 5 V 0.82 V 500 µA/µm
PMOS 5 V -0.88 V -240 µA/µm

Capacitors

  Max Voltage Typical Value
MIM 15 V 1.0 fFµm²
CPNW 5 V (5 V gate oxide to NW),
Vgs=5.0 V
5 V 2.46 fFµm²

Resistors

  Typ Value Temp Coef
Nwell under STI 1400 Ω/sq 3600 ppm/°C
P+poly unsilicided 280 Ω/sq -75 ppm/°C
Low Tempco Poly unsilicided 335 Ω/sq -34.2 ppm/°C
High Rs Poly unsilicided 1500 Ω/sq 1200 ppm/°C
HV NWell under STI 690 Ω/sq -
HV PWell under STI 4900 Ω/sq -
 

BJTs

  Typ Beta Typ BVceo
(V)
Typ BVcbo
(V)
NPNH 52 26 65
NPNL 17.4 27 27
PNPSLV 9.3 24 35
PNPS 2.6 12 19.2

Forward Vf Diodes

  Min BV (V)
P+/Nwell 7
N+/Pwell 7
P+/HVnwell 14
N+/HVpwell 14
HVpwell/Nbl 56
Pwell/HVnwell 20
Pbl/Nbl 46
18V Schottky 22
30V Schottky 32
40V Schottky 44

Avalanche Diodes

  Typ BV (V)
Pbody/Nwell 15
5.15 V Zener 5.15
5.5 V Zener 5.5
6.2 V Zener 6.2
7.4 V Zener 7.4

ESD Protection

  HBM Levels
LV ESD Diodes 2 – 8 kV
LV Supply Clamps 2 - 4 kV
HV 4 kV ESD Diodes 2 - 4 kV
HV Supply Clamps 2 kV

Libraries

Front-End Digital Design
Digital
Synthesis Libraries
Simulation Libraries
Analog
Design Rules
Parameterized layout cells
Spectre Models

Standard Cell
5 V core cell
398 total cells
1-layer metal and 2-layer metal pwr rail option
33.1 k gates/mm² (Routed @ 75% util)
0.122 ns prop delay (2-input NAND, fanout = 2)

Memory Options

OTP
5 V Poly fuse
32 – 256 bit in 32 bit increments

CAD Tool Compatibility

Digital Design
Synopsys Design Compiler
Cadence RTL Compiler
Mentor Graphics FastScan (DFT)

Analog Design
Cadence Virtuoso, VirtuosoXL, Spectre and Eldo
Mentor Graphics Design Architect IC, IC Station and Eldo

Place and Route
Cadence Encounter
Synopsys Apollo

Physical Verification
Mentor Graphics Calibre

For more information please contact your local sales support at www.onsemi.com