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線形重ね合わせ : サーマルRCネットワークに関するチュートリアル – リニアサーマルシステムについての過渡解析

線形重ね合わせ:サーマルRCネットワークに関するチュートリアル(Linear Superposition: Tutorial On Thermal-RC Networks Webinar)を閲覧してください。
時間: 45分


概要

本セミナーでは、リニアサーマルシステムの過渡解析に関するいくつかの基本的な概念がいかに実際のサーマルシステム設計に適用されるか説明します。使われている数学理論が原理とされ、通常は(実験上の予測がモデルの最終結果と整合するかの確認を除き)正当性の証明を正式に行うことはありません。参加者は基本的な微積分学、初級の線形微分方程式理論、技術物理(基礎のリニア電気ネットワーク概念および熱伝達)に関する経験があれば、本セミナーで取り扱われる資料を問題なく理解できると考えます。

本セミナーでは、リニアシステムは何で構成されているか、継続的な領域がいかに事実上任意のリニアサブシステムに離散されサーマルRCネットワークにつながるか、ステップ応答とは何か、リニアシステムのステップ応答のリニアの組み合わせがいかにより複雑なソリューション、より複雑な強制関数を生成するために結合されるか等の基本的概念が取り扱われます。

現実問題として、半導体サーマルキャリブレーション・チェンバーの設計および制御が考慮されます。背景として、キャリブレーションシステムの主要なヒーター部分の限定的要素モデルが、設計期間に初期構築の選択を導くために作成されましたが、実際のサーマルステップ応答は、チェンバーを構築した後に測定しました。本セミナーでは、主要な測定パラメータの妥当性を示すため、簡易的な計算方法をご紹介します(具体的に、元の限定的要素モデルに含まれない特定のシステム特性を指します)。測定したステップ応答は、結果的にチェンバーの実用的な稼働につながる、オープンループ制御システムを基本的に実現するために、どのようなパワー入力機能が要求されるかを予測するために使われます。続いて設計した制御入力に対するシステムのオープンループ応答を測定し、予測した応答と比較します。予測した応答からの偏差についてここで議論されます。

システムの限定的な要素モデルは設計段階で構築しましたが、全ての実験データ整理とそれに続くパワー入力制御の生成にはMicrosoft Excelが使われました。このように、Excel上で利用可能な様々な分析テクニックをご紹介いたします。


発表者

ロジャー・スタウト、オン・セミコンダクターの研究科学者